Vertical furnace - ASM
Vertical furnaces are real powerhouses, offering great productivity while safeguarding quality. ALD capability is available on ASM furnaces, further exploiting the benefits of their productivity, too.
A400® DUO vertical furnace - ASM
A400 DUO is a batch vertical furnace for 200mm and smaller wafers, and focuses on applications in the markets for power, analog, RF, and MEMS devices. The A400 DUO furnace tool is …
SONORA® 300mm vertical furnace - ASM
SONORA is a 300mm batch vertical furnace for logic/foundry and memory applications, as well as 300mm analog/power. SONORA is capable of both atmospheric and low-pressure thermal …
ASM INTERNATIONAL N.V. LAUNCHES SONORA® VERTICAL FURNACE …
2022年7月12日 · ASM’s predecessor A412™ vertical furnace system has a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in …
ASM INTERNATIONAL N.V. LAUNCHES A400™ DUO VERTICAL FURNACE
2019年11月11日 · New system addresses 200mm applications with high productivity and low cost of ownership. Munich - ASM International N.V. (Euronext Amsterdam: ASM) today introduced …
Asm International N.V. Launches A400™ Duo Vertical Furnace …
ASM’s original A400™ vertical furnace system has a proven track record of more than 1000 reactors shipped to customers worldwide and over 25 years of maturity in semiconductor …
BALD Engineering - Born in Finland, Born to ALD: ASM …
2022年7月12日 · ASM’s predecessor A412™ vertical furnace system has a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in …
ASM International launches A400(TM) Duo vertical furnace …
2019年11月11日 · ASM’s original A400™ vertical furnace system has a proven track record of more than 1000 reactors shipped to customers worldwide and over 25 years of maturity in …
ASM International N.V. Launches SONORA Vertical Furnace System
2022年7月12日 · ASM International N.V. introduced the SONORA® vertical furnace system with dual reactor chambers for 300mm wafers. The system's dual boat reactors produce the …
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Vertical furnaces offer very high productivity solutions for a wide range of thermal processes including low pressure chemical vapor deposition (LPCVD), diffusion and oxidation. How we …