Semiconductor Wafer Handling Systems | Jabil
We design and build reliable, industry-trusted semiconductor wafer handling systems for some of the world’s leading semiconductor manufacturers around the globe. Whether it’s a turnkey Equipment Front End Module (EFEM) or a fully custom wafer handling solution -- our wafer handling know-how will ensure your next automation project is a success.
纳米集成电路制造工艺-第七章（光刻技术） 光刻设备和材料
硅片输运分系统的任务是将轨道机传递来的硅片准确无误地按照一定的角度和位置放预对准平台（pre-alignment stage）内进行预对准 （有的光刻机甚至开始对硅片进行温度调整），预对准完成后，由机械手将硅片按照预定的位置放在硅片平台上。 这时，硅片在硅片平台上相对对准系统的位置精度一般小于1. 7.6.1 光刻机原理介绍 一台光刻机可分为几大系统：硅片输运分系统（wafer handler sub-system）硅片平台分系统（wafer stage sub-system）掩膜版输运分系统 （ reticle …
Wafer Handling Systems | Solutions | Brooks - Brooks Automation
Brooks offers a comprehensive portfolio of configurable atmospheric and vacuum wafer handling platforms and systems. In addition, Brooks provides the ability to create flexible, cost-effective, and unique solutions to meet each customer’s specific application.
揭秘晶圆移载系统：半导体制造背后的核心技术
在现代半导体制造过程中，晶圆移载系统(Wafer Handler)扮演着极其关键的角色。 随着技术的不断进步，对半导体器件的需求日益增加，晶圆移载系统的性能和可靠性也成为了行业众多关注的焦点。
Wafer handler for semiconductor industries | iselRobotik
isel Robotics' flagship products are robots for conveying wafers, masks and substrates in the semiconductor industry. These wafer handlers meet the strict requirements for clean rooms of ISO 1 and impress with their precision and reliability.
Wafer Handling Systems
Unlocking Precision and Efficiency at Wafer Handling Systems (WHS), we're not just handling wafers; we're shaping the future of semiconductor manufacturing. Our portfolio features four cutting edge systems - WHS-T1, WHS-T2, WHS-T3, and WHS-T4 systems, meticulously designed to handle 76 mm, 100 mm, 150 mm, and 200 mm wafers with unparalleled ...
半导体晶圆搬运机械臂 | NIDEC（尼得科） - Nidec Corporation
尼得科集团研发的“SR8241”系列超洁净机械臂用于搬运半导体晶圆，它通过自主研发的三连杆结构实现了三连杆机械臂。 其他公司使用的是双连杆机械臂，而三连杆机械臂可以缩短每个臂的长度，因此我们成功地将移动范围缩小了72毫米。 半导体制造设备领域中对紧凑性的要求通常是以10mm为单位的，三连杆机械臂对该领域影响深远。 用于搬运的机械臂在前后摆放着的四个暗盒之间来回移动，但通过缩小移动范围，则可以保持半导体制造设备本身的尺寸紧凑。 此外还有 …
‘FOUP’ Wafer Handler For Semiconductor Wafers | ePAK
A wafer FOUP is a specialized container designed to safely transport 300mm silicon wafers within automated material handling systems (AMHS). FOUP is specifically designed to accommodate 300mm wafers, which have become the standard in modern semiconductor manufacturing.
Innovative robot technology for Wafer Handling | iselRobotik
Reliable and long-lasting components for wafer handling by isel cover all the needs of OEM customers in the semiconductor industry. The Advanced Controller has a defined path speed, so that speed and acceleration focus on the tool centre point (TCP) and not on the individual axes.
Wafer handler for semiconductor industries | iselRobotik
isel Robotics' flagship products are robots for conveying wafers, masks and substrates in the semiconductor industry. These wafer handlers meet the strict requirements for clean rooms of ISO 1 and impress with their precision and reliability.
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